发明名称 |
BLOKPOLYMEER-BEVATTENDE SAMENSTELLINGEN. |
摘要 |
Block polymer compositions are provided which are useful as positive or negative resists utilizing aryl onium salts in combination with silicone-organic block polymers, such as polydimethylsiloxane-poly-t-butylmethacrylate block polymers. A silicone prepolymer is used in combination with certain polymerizable vinyl monomers such as t-butylmethacrylate. The silicone prepolymer has chemically combined pinacolate groups in the backbone or terminal positions which are capable of generating free-radicals upon thermolysis. |
申请公布号 |
NL8700989(A) |
申请公布日期 |
1987.11.16 |
申请号 |
NL19870000989 |
申请日期 |
1987.04.27 |
申请人 |
GENERAL ELECTRIC COMPANY TE SCHENECTADY, NEW YORK, VER. ST. V. AM. |
发明人 |
|
分类号 |
C08F293/00;C08G85/00;C08K5/00;C08L53/00;C08L83/10;G03F7/075;(IPC1-7):C08F283/12;G03C1/68;C08G77/42 |
主分类号 |
C08F293/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|