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发明名称
摘要
申请公布号	JP2746075(B2)	申请公布日期	1998.04.28
申请号	JP19930238039	申请日期	1993.09.24
申请人		发明人
分类号	H01L21/762;H01L21/76;H01L27/04;H01L27/08;H01L27/088;H01L29/78;(IPC1-7):H01L21/762	主分类号	H01L21/762
代理机构		代理人
主权项
地址

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