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发明名称
摘要
申请公布号
JP2746172(B2)
申请公布日期
1998.04.28
申请号
JP19950035898
申请日期
1995.02.02
申请人
发明人
分类号
H01L21/66;G01R31/28;G01R31/30;G01R31/3185;G06F11/267;H01L21/3205;H01L21/822;H01L23/52;H01L27/04;(IPC1-7):H01L21/66;G01R31/318
主分类号
H01L21/66
代理机构
代理人
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地址
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