| 摘要 |
PURPOSE:To make it possible to compute the position of the tip part of a probe needle accurately, by pushing the tip part of the probe needle of a probe card and a minute plane, which is supported with a spring with a compressing means, detecting the inclination of the minute plane, and obtaining the position of the tip part of the probe needle on the minute plane. CONSTITUTION:When a probe needle 1 is pushed to a needle sensing plate 11 by a specified amount, the inclination of the needle sensing plate 11 is changed by the position of the probe needle 1. In order to detect the amount of the inclination, a laser beam 3 is projected on the rear surface of the needle sensing plate 11. The inclination of the reflected light of the laser beam is detected with a position sensor 7. The position detected with the position sensor is made to correspond one to one to the position of the probe needle on the needle sensing plate 11. For this purpose, the probe needle 1 is pushed to a plurality of places on the needle sensing plate 11. The ratio between the probe needle 1 and the spring constant of a spring 60 is obtained based on the output values of the position sensor 7 at each place. Then the accurate position of the probe needle 1 is computed.
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