| 摘要 |
PROBLEM TO BE SOLVED: To reduce spring constant of an elastic function part of a probe so as to realize a scanning probe microscope having high resolution. SOLUTION: A tip of a probe is pointed, and a stepped part 6 at a boundary between a basic part 5 and an elastic function part 4 is formed into a tapered shape. A diameter of the elastic function part 4 is smaller than a diameter of the basic part 5, and a part of the elastic function part 4 is constricted. Moreover, a probe material is optical fiber and consists of a core part 2 which transmits light and clad parts 3 having different refractive indexes, and a part except a through hole at a tip thereof is covered with a metal film covering 7. |
