| 摘要 |
PROBLEM TO BE SOLVED: To increase anticorrosive property and adhesiveness with an underlying layer, by forming a Ti1-x Alx N film layer having a specified thickness via an Al film having a specified thickness on a Ti film having a specified thickness and being formed on a surface of a R-Fe-B permanent magnet body in which a main phase is made of a tetragonal phase. SOLUTION: On a cleaned surface of a R-Fe-B permanent magnet body in which a main phase is made of a tetragonal phase, a Ti film having a thickness of approximately 0.1 to 3.0μm is formed by a thin film deposition method. Then, an Al film having a thickness of approximately 0.1 to 5μm is formed on the Ti film. In addition, a Ti1-x Alx N film layer (where 0.03<x<0.70) having a thickness of approximately 0.5 to 10μm is formed on the Al film. By thus causing the Al film layer to exist as an intermediate layer, the Al film layer functions as a sacrifice layer with respect to a permanent magnet and the Ti film of the underlying layer. Thus, adhesiveness with the Ti film is significantly improved, and excellent anticorrosive property and wear resistance are realized. |
