| 摘要 |
PROBLEM TO BE SOLVED: To provide a permanent magnet for ultra high vacuum which has good adhesion of a coating film thereon, is tight, can prevent the generation and release of gas from the magnet body, and has a high magnetic characteristic used for an undulator, etc., in the ultra high vacuum of below 1×10<-9> Pa. SOLUTION: After the surface of an Fe-B-R permanent magnet body is cleaned by an ion sputtering method, etc., an aluminum coating film of 0.06 to 5.0×m thickness is formed on the surface of the permanent magnet body by a method for firming a thin film such as an ion plating method, etc. An AlN coating film of 5.0 to 20μm thickness is formed on the aluminum coating film in an atmosphere of N2 gas by a method for forming a thin film such as an ion reaction plating method, etc. The can prevent the generation of a gas adhering to the magnet or absorbed by the magnet, and enables effective use of high magnetic characteristics of the magnet. |
