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发明名称
SEMICONDUCTOR DEVICE AND FABRICATION THEREOF
摘要
申请公布号
JPH10107287(A)
申请公布日期
1998.04.24
申请号
JP19960261686
申请日期
1996.10.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
IMAI YUKARI
分类号
H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L29/786
代理机构
代理人
主权项
地址
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