Substrate positioning device and substrate positioning method

摘要

It is intended to achieve a high level of positioning accuracy for a substrate assuming a two-layer structure constituted with a transparent layer with a high level of light transmissivity and a nontransparent layer with a low level of light transmissivity. A substrate positioning device according to the present invention characterized in that only the edge of the nontransparent layer, not the edge of the transparent layer, is exclusively detected and the substrate is positioned based upon the detection results.