发明名称 |
Narrow width trenches for field isolation in integrated circuits |
摘要 |
An integrated circuit device has a plurality of active devices which are formed on a semiconductor body. A plurality of narrow isolating regions of insulating material are vertically formed on the semiconductor body such that at least one of the narrow isolating regions separates and thereby isolates adjacent active devices. Essentially all of said isolating regions are substantially equal in width, preferably less than or equal to about 0.5 mu m.
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申请公布号 |
US5742090(A) |
申请公布日期 |
1998.04.21 |
申请号 |
US19960625814 |
申请日期 |
1996.04.04 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
STOLMEIJER, ANDRE;OMID-ZOHOOR, FARROKH |
分类号 |
H01L21/762;(IPC1-7):H01L29/00;H01L29/76;H01L29/94 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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