发明名称 Coaxial drive elevator
摘要 The present invention resides in an elevator mechanism comprising a base plate defining the bottom wall of a chamber disposed above the base plate. The base plate has a top surface and a bottom surface with an opening therein communicating between the top and bottom surfaces. A first drive is disposed below the base plate for linear movement parallel to a first given direction. A carriage is connected for movement to the first drive and carries a lift tube extended upwards from the carriage along the given direction and through the opening in the base plate. The lift tube including a coaxially disposed rotary shaft therewithin. A second drive having an output is provided and is supported on the carriage parallel to the given direction and spaced from the rotary shaft in a side-by-side orientation. A coupling is also provided for drivingly connecting the output of the second drive to the rotary shaft.
申请公布号 AU4230497(A) 申请公布日期 1998.04.17
申请号 AU19970042304 申请日期 1997.08.29
申请人 BROOKS AUTOMATION, INC. 发明人 CHRISTOPHER HOFMEISTER
分类号 B65G49/07;B66B9/02;F16H25/20;H01L21/00;H01L21/677;H01L21/687 主分类号 B65G49/07
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