申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
FUJIKI, HIRONAO, TAKASAKI-SHI, GUNMA-KEN, JP;SHUDO, SHIGEKI, ANNAKA-SHI, GUNMA-KEN, JP;MATSUDA, AKIRA, ANNAKA-SHI, GUNMA-KEN, JP;OGAWA, NORIYOSHI, TOYONAKA-SHI, OSAKA, JP;TAKATA, TOISHIAKI, TOYONAKA-SHI, OSAKA, JP |