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发明名称
PLASMA CVD APPARATUS
摘要
申请公布号
KR0115169(Y1)
申请公布日期
1998.04.15
申请号
KR19910014239U
申请日期
1991.08.31
申请人
SAMSUNG ELECTRONICS CO.,LTD
发明人
SHIN, JONG-UP
分类号
H01L21/302;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
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