Regeneration of adsorbent beds

摘要

A nickel-based catalytic adsorbent used for removal of unwanted species contained in cryogenically produced ultra-high purity product gas, especially nitrogen, is regenerated using periodic hydrogen reduction with interim regeneration using product gas of 99.9999% purity. In the interim regeneration(s), the adsorbent is heated to at least 150 DEG C, contacted with the regeneration product gas whilst maintained at at least 150 DEG C, and then cooled to at most 50 DEG C.