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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH1098112(A)
申请公布日期
1998.04.14
申请号
JP19960249604
申请日期
1996.09.20
申请人
HITACHI LTD
发明人
NAGASHIMA KENICHI
分类号
H01L21/8238;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/8238
代理机构
代理人
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