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发明名称
ION IMPLANTATION
摘要
申请公布号
JPH1098003(A)
申请公布日期
1998.04.14
申请号
JP19970158780
申请日期
1997.06.16
申请人
APPLIED MATERIALS INC;INTEL CORP
发明人
ADIBI BABAK;FOAD MAJEED ALI;TAYLOR MITCHELL C
分类号
C23C14/48;H01L21/265;(IPC1-7):H01L21/265
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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