发明名称 |
MOUNTING A SOLID STATE PARTICLE DETECTOR WITHIN A MAGNETIC DEFLECTION FIELD |
摘要 |
A solid state electron or x-ray detector is mounted within the time-varying magnetic deflection fields of a charged particle beam system. A minimum volume of high resistivity conductors and insulating materials are used in the mounting to minimize eddy currents that otherwise cause dynamic deflection distortions. Segmented conductive elastomer members make electrical and mechanical contact with the active surface of the detector. A flexible PC board connects the detector active areas to external signal processing electronics.
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申请公布号 |
CA2238359(A1) |
申请公布日期 |
1998.04.09 |
申请号 |
CA19972238359 |
申请日期 |
1997.09.26 |
申请人 |
ETEC SYSTEMS, INC. |
发明人 |
GARCIA, RUDY F.;VENEKLASEN, LEE H. |
分类号 |
H01J37/244;(IPC1-7):H01J37/244 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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