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经营范围
发明名称
AC MEASURING CIRCUIT
摘要
申请公布号
JPH09178818(A)
申请公布日期
1997.07.11
申请号
JP19950340332
申请日期
1995.12.27
申请人
KAWASAKI STEEL CORP
发明人
TAKENOBU SEIJI
分类号
G01R31/319;G01R31/28;H01L21/66;H01L21/8238;H01L27/092;(IPC1-7):G01R31/28;H01L21/823
主分类号
G01R31/319
代理机构
代理人
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