| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of controlling the wire travel of a wire-saw capable of carrying out the most suitable supply of new wire. SOLUTION: A delivery in the forwarding direction and a delivery in the withdrawing direction of reciprocation wire 14 are controlled through measurement of the wire 14 after cutting an ingot 32 so that the diameter of the wire 14 after cutting the ingot 32 becomes constant. Namely, an abrasion limit value thereof is set previously in such a manner that when the diameter of the wire 14 after cutting the ingot 32 exceeds the abrasion limit value, a quantity of supply of new wire is reduced (a difference between a delivery in the forwarding direction and a delivery in the withdrawing direction is made small) and when it does not exceed the value, a quantity of supply of new wire is increased (a difference between a delivery in the forwarding direction and a delivery in the withdrawing direction is made large). In this manner, the diameter 14 forming a row 20 of wire is always stable during the period of cutting the ingot, as a result, the accuracy of a wafer to be cut is improved. |
