发明名称 |
Method for producing thin film solar battery |
摘要 |
In producing a thin film solar battery using a semiconductor film producing apparatus, a semiconductor film is formed on a substrate by glow discharge decomposition. The substrate is transported in a desired direction within a glow discharge space. A substrate heating unit heats the substrate at different temperatures along the desired direction in which the substrate is transported. Consequently, a plurality of semiconductor layers having different hydrogen concentrations are laminated at desired thicknesses with desired characteristics. A glow discharge generating unit generates high frequency power having different frequencies and/or different power outputs along the desired direction in which the substrate is transported.
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申请公布号 |
US5736431(A) |
申请公布日期 |
1998.04.07 |
申请号 |
US19960608543 |
申请日期 |
1996.02.28 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.;TDK CORPORATION |
发明人 |
SHINOHARA, HISATO;ARAI, YASUYUKI |
分类号 |
H01L31/052;H01L31/075;H01L31/20;(IPC1-7):H01L31/20 |
主分类号 |
H01L31/052 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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