摘要 |
<p>PROBLEM TO BE SOLVED: To machine an object by selecting the most suitable laser beam for machining the object among plurality of numbers of laser beam having different property. SOLUTION: Four laser beams having different pulse duration of operating time are emitted to a selecting part 14 from a laser light source 11 through light quantity changing parts 12-1 to 12-4 and apertures 13-1 to 13-4. A controlling circuit 21 lets the selecting part 14 select the most suitable laser beam for machining an object 18. With the laser beam selected by the selecting part 14, the object 18 to be machined is irradiated through a dichroic mirror 15 and an objective lens 18.</p> |