| 摘要 |
<p>PROBLEM TO BE SOLVED: To remove oxygen contained in inert gas and adjust the concentration of carbon dioxide. SOLUTION: This gas refining device consists of treating cylinders 11, 12 with an oxygen uptake member 10, an inert gas circulation switching valve 13 which causes either of the treating cylinders 11, 12 to communicate with an inert gas flow path 25, an inert gas circulation switching valve 14 which causes either of the gas treating cylinders 11, 12 to communicate with an inert gas flow path 28, a hydrogen gas supply switching valve 15 which causes either of the gas treating cylinders 11, 12 to communicate with a hydrogen gas supply switching valve 15, a valve 18 for adjusting the supply flow rate of carbon dioxide gas which is connected to the inert gas flow path 25 and communicates with a carbon dioxide gas supply source 19, and an exhaust circulation switching valve 20 which communicates with the gas treating cylinders 11, 12. Oxygen contained in the insert gas is up taken by the oxygen uptake members 10 of the gas treating cylinders 11, 12 alternately. Further, the concentration of carbon dioxide contained in the inert gas is controlled by supplying the carbon dioxide gas to the inert gas flow path 25 from the carbon dioxide gas supply source 19.</p> |
