PETERMINATION METHOD OF HMDS RETREATMENT

摘要

HMDS reprocessing determination method is disclosed. In order to determine whether reprocess HMDS or not, HMDS for improving affinity between a photoresist and a lower layer before coating the photoresist on a upper layer is processed. After a predetermined time is elapsed, wave number which shows that HMDS ingredient is included in a FTIR(Fourier Transform Infrared Spectrometer) equipment is measured. Then, HMDS reprocessing is not done if the measured wave number has the same peak value anticipated at the wave number of the FTIR equipment. If the wave number whose peak value is anticipated is not measured, HMDS reprocessing is done according to the sample specification.