Target for generating pulsed x=ray and extreme ultraviolet radiation using pulsed laser radiation

摘要

The target generates pulsed x-ray and EUV radiation using the effect of pulsed laser radiation. The target comprises a fluid film which is made of or includes target material. The film is a free standing fluid film. The fluid film is preferably arranged in a holder frame using adhesion and surface tension. Several frames may be provided in the edge of a circular disk. The thickness of the film is preferably less than 200 micrometers. The film may be made of a metallic element or a metal compound esp. of lithium, tin, iron, copper, barium or compounds of these elements. Preferably the fluid film is stiffened before the effect of the laser radiation.