| 摘要 |
PURPOSE:To obtain an interference light containing phase information by constituting a variable optical path of a structure in which one of light beams which have been demultiplexed by an optical demultiplexer and multiplexer is allowed to pass through an inspecting body and the other is not allowed to pass through a body to be inspected and multiplexing both the light beams. CONSTITUTION:A white light 11 emitted from a white light source 10 is made incident directly on an optical interferometer 20, and also, by an optical demultiplexer and multiplexer 21, one of said light and the other are demultiplexed to a variable optical path 22 and a fixed optical path 23, respectively. One of this demultiplexed light is led to inspected body connecting parts 12, 13 provided on the fixed optical path 23 side, and by connecting a body to be inspected 15 thereto, a light beam which is passed through the body to be inspected and a light beam which is passed through the variable path 22 are multiplexed and allowed to interfere with each other, and by receiving them by a light receiving device 26, an optical interference signal is obtained. This optical interference signal is brought to frequency analysis, and from a real part and an imaginary part which are obtained, a phase characteristic and an amplitude characteristic of the body to be inspected are derived. |
