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发明名称
Kühlvorrichtung für ein Wafer
摘要
申请公布号
DE69128264(T2)
申请公布日期
1998.04.02
申请号
DE1991628264T
申请日期
1991.07.16
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
HARA, SHINICHI, C/O CANON KABUSHIKI KAISH, OHTA-KU, TOKYO, JP;EBINUMA, RYUICHI, C/O CANON KABUSHIKI KAISHA, OHTA-KU, TOKYO, JP
分类号
G03F7/20;H01L21/00;H01L21/027;H01L21/30;H01L21/683;H01L23/34;H01L23/427;(IPC1-7):H01L23/427;H01J37/20;H01L21/68
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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