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经营范围
发明名称
Clean room ceiling structure and filter replacing system
摘要
申请公布号
GB2317583(A)
申请公布日期
1998.04.01
申请号
GB19970020575
申请日期
1997.09.26
申请人
* NEC CORPORATION
发明人
HITOSHI * SEKIGUCHI
分类号
F24F7/06;B01D46/00;B01D46/10;B01D46/42;B01D46/52;E04B9/02;F24F3/16;H01L21/02;(IPC1-7):B01D46/42;F24F13/28
主分类号
F24F7/06
代理机构
代理人
主权项
地址
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