发明名称 |
Probe, manufacturing method therefore and scanning probe microscope |
摘要 |
<p>A tip of a probe is sharpened and a level difference portion 6 in a boundary zone between a base portion 5 and an elastic functioning portion 4 is formed into a tapered configuration. The diameter of the elastic functioning portion 4 is made smaller than that of the base portion 5. Also, a part of the elastic functioning portion 4 is shaped into a constricted configuration. Also, the probe material is an optical fiber and this probe is composed of a core portion 2 that propagates light therethrough and clad portions 3 that differ in refractive index from each other. And the portion of the probe that excludes a aperture is clothed by a metal film cladding 7. <IMAGE></p> |
申请公布号 |
EP0801318(A3) |
申请公布日期 |
1998.04.01 |
申请号 |
EP19970103779 |
申请日期 |
1997.03.06 |
申请人 |
SEIKO INSTRUMENTS INC. |
发明人 |
MURAMATSU, HIROSHI;YAMAMOTO, NORITAKA;CHIBA, NORIO;NAKAJIMA, KUNIO |
分类号 |
G01B11/30;G01N37/00;G01Q20/04;G01Q60/18;G01Q60/22;G01Q60/32;G01Q60/38;G01Q70/10;G01Q70/16;(IPC1-7):G02B21/00 |
主分类号 |
G01B11/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|