发明名称 |
Method of forming electrical connections for a semiconductor |
摘要 |
<p>A silicon film (170) is deposited using low pressure chemical vapor deposition (LPCVD) to fill in openings (145, 155) formed in a substrate such as an insulating film (135). An aluminum film (175) and a metal film (180) are then formed on the silicon film (170). A thermal process is then carried out. This thermal process causes the deposited aluminum to replace the silicon in the openings (145, 155) because the silicon migrates to the metal and forms a metal silicide film. The aluminum which replaces the silicon in the openings (145, 155) has few or no voids. The metal silicide film any remaining portion of the aluminum film are then removed using CMP, for example. <IMAGE></p> |
申请公布号 |
EP0833381(A2) |
申请公布日期 |
1998.04.01 |
申请号 |
EP19970116465 |
申请日期 |
1997.09.22 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
SUGIMOTO, SHIGEKI;OKUMURA, KATSUYA |
分类号 |
H01L23/522;H01L21/304;H01L21/768;(IPC1-7):H01L21/768 |
主分类号 |
H01L23/522 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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