LIQUID CRYSTAL DISPLAY DEVICE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To improve the luminance of a liquid crystal display device by improving the reflectivity of a reflection liquid crystal element. SOLUTION: A wiring 25a connected to the source region 22a an MOSFETQ11 formed on the main surface of a semiconductor substrate 13 is covered with an insulating film 26 having a flattened front surface and an electrode 14 for impressing a liquid crystal driving voltage consisting of a titanium layer 14a as a lower layer and an aluminum alloy layer 14b as an upper layer is formed on this insulating film 26. At the time of producing the reflection liquid crystal element, the films are continuously formed without breaking vacuum after the deposition of the titanium layer 14a before the deposition of the aluminum alloy layer 14b. The oxide of the titanium formed on the surface of the titanium layer 14a is otherwise removed by sputter etching before the deposition of the aluminum alloy layer 14b.