| 摘要 |
<p>PROBLEM TO BE SOLVED: To cut down the time taken for setting a cassette to an orientation flat alignment mechanism by a method wherein, after obliquely fixing the orientation flat alignment mechanism making a small angleαwith the horizontal surface against the pivoting direction of a cassette, a cassette stage is pivoted likewise making a small angle with the horizontal surface centered on a cassette pivoting axle. SOLUTION: An orientation flat alignment mechanism 200 is obliquely fixed making a small angleαwith the horizontal surface against the pivoting direction of a cassette 70. Next, a cassette stage 100 loaded with the cassette 70 containing a plurality of wafers 80 leaving such a state intact is pivoted making a small angleαwith the horizontal surface in the arrow C' direction centered on a pivoting axle 90 and then set to the orientation flat alignment mechanism 200 for making the orientation flat alignment. Through these procedures, the time taken for the orientation flat alignment can be cut down without annexing any lifting mechanism to the alignment mechanism 200 at all.</p> |
