| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film actuated mirror array which is enhanced in adhesiveness between thin-film layers constituting actuated mirrors and has an improved mirror form and a process for producing the same. SOLUTION: This thin-film actuated mirror array includes an active matrix 210 having a substrate 212 and M×N pieces of connecting terminals 214 and an array 310 of M×N pieces of driving mirror structural bodies 311 respectively having first thin-film electrodes 295, barrier parts 285, electrically deformable thin-film parts 275, second thin-film electrodes 265 and elastic parts 255. The electrically deformable thin-film part 275 exist between both electrodes 295 and 265 and the barrier parts 285 exist between the first thin-film electrodes 295 and the thin-film parts 275. The second thin-film electrodes 265 have front surfaces damaged by ions. The lower parts at the proximal ends of the respective actuated mirror structural bodies are attached to the upper part of the active matrix 210 and cantilever the driving mirror structural bodies 311.
|
