| 摘要 |
PURPOSE: A stepper device for manufacturing a semiconductor device is provided to supply the insufficient amount of beam by varying the amount of beam transferred to a wafer. CONSTITUTION: A stepper device for manufacturing a semiconductor device comprises a light source(10,11), a filtering portion(13,100), an optical portion(14,15,16), and a pattern formation portion(17,18,20). The light source(10,11) generates a beam with a multitude of wavelength band and forms an optical path therefrom. The filtering portion(13,100) is installed on the optical path in order to filter the beam of a predetermined wavelength band. The filtering portion(13,100) varies a filtering width of the beam in order to vary the wavelength band. The optical portion(14,15,16) controls the filtered beam to improve the focus and the uniformity of the beam. The pattern formation portion(17,18,20) forms a pattern on a wafer.
|
