| 摘要 |
PROBLEM TO BE SOLVED: To perform the marking complied with objects and to improve the throughput of marking by providing an optical path changeover means of a laser beam and plural scanning optical systems. SOLUTION: A laser beam 8 is made incident on a scanning optical system 1a when the reflector 12 of an optical path changeover device 11 is located on a position B, after changing the optical path by a reflecting mirror 6a, converged by a fθlens 7a and an object 21a is irradiated with a laser beam 9a. Likewise, after changing the optical path by a reflecting mirror 6b, converged by a fθlens 7b, an object 21b is irradiated with a laser beam 9b. Since the scanning optical systems 1a, 1b are operated independently to the objects 21a, 21b, exact marking of pattern is performed corresponding to each object when the objects 21a, 21b are different from each other.
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