| 摘要 |
PROBLEM TO BE SOLVED: To lessen the propagation loss and bending loss and to improve reproducibility at the time of forming an optical waveguide. SOLUTION: This process for production consists of forming the optical waveguide by forming a groove for forming a core part on the front surface of a lower clad layer 2 formed on the main surface of a substrate, then forming a core layer so as to embed the groove on the lower clad layer 2, removing the main surface side of the substrate to a prescribed thickness to allow the core layer to remain only in the groove and to form the core part 3 to make light propagation effect, then forming an upper clad layer 7 on the main surface side of the substrate and embedding the core part 3. After the formation of the core part 3, diffusion preventive grooves 6 along the core part 3 are formed on the surfaces of the lower clad layers 2 on both sides or one side of the core part 3 and are thereafter subjected to a heat treatment. The upper clad layers 7 are then formed to cover the diffusion preventive grooves, by which the optical waveguide is formed. |
