METHODS AND APPARATUS FOR ELECTROPOLISHING METAL INTERCONNECTIONS ON SEMICONDUCTOR DEVICES,申请号IL19990140713-传众专利搜索

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发明名称	METHODS AND APPARATUS FOR ELECTROPOLISHING METAL INTERCONNECTIONS ON SEMICONDUCTOR DEVICES
摘要
申请公布号	IL140713(D0)	申请公布日期	2002.02.10
申请号	IL19990140713	申请日期	1999.07.08
申请人	ACM RESEARCH INC.	发明人
分类号	B23H5/08;C25F3/22;C25F7/00;H01L21/304;H01L21/3205;H01L21/321;H01L21/3213;H01L21/768;(IPC1-7):H01L	主分类号	B23H5/08
代理机构		代理人
主权项
地址

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