HYBRID OPTICAL INTEGRATED CIRCUIT AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To provide a hybrid optical integrated circuit in which semiconductor elements and optical waveguides formed on an Si substrate are optically coupled with high accuracy and a process for producing the same. SOLUTION: The semiconductor elements 20 having plural alignment marks 21 for optical axis adjustment on the rear surfaces and the Si substrate 22 likewise formed with plural alignment marks 23 for optical axis adjustment are subjected to optical axis alignment by these alignment marks 21, 23 for optical axis adjustment using means for image processing, etc. In this case, the plural optical axis aligmnent marks formed on the substrate 22 are formed round, by which the semiconductor elements 20 and the optical waveguides formed on the Si substrate 22 are optically coupled with the high accuracy. The hybrid optical integrated circuit having the extremely high accuracy is, therefore, obtd.