| 摘要 |
PROBLEM TO BE SOLVED: To simplify the structure of a device by inverting a cassette by 90 deg. by inverting a cassette supporting base through the application of a vertical driving force to the base and horizontally rotating the inverted cassette by a prescribed angle by means of an actuator means. SOLUTION: A cassette-supporting base 44 is composed of a bottom- supporting section and a back-supporting section 54 which are joined to each other at a right angle. The lower supporting plate 52B of the bottom-supporting section is coupled with an auxiliary pedestal 42 with hinges 56 in an expandable to rotatable state. An elevating/lowering rod 35 which can be elevated and lowered by means of an elevating/lowering mechanism is connected to an elevating/lowering pedestal 34, and the pedestal 42 and base 44 are provided in an expandable to ratable states. The base 44 can be rotated by 90 deg. about a main shaft 40 by means of a rotating mechanism 58. The base 44 can be rotated by a prescribed angle about the hinges 56 by driving an actuator means 62, such as air cylinder, etc., provided on the outside of a camber container 21. Since no pivot mechanism is required in a chamber, the generation of particles can be suppressed and, at the same time, the structure of the chamber becomes simple and the cost of the chamber is reduced. |
