发明名称 ELECTRON BEAM IRRADIATING METHOD AND OBJECT TO BE IRRADIATED WITH ELECTRON BEAM
摘要 <p>Electrons are accelerated in a vacuum by a voltage and the accelerated electrons are taken out into a normal pressure atmosphere and are applied to an object as an electron beam (EB). The acceleration voltage for generating the electron beam is lower than 100 kV by using a vacuum-tube type electron beam accelerator.</p>
申请公布号 WO1998010430(P1) 申请公布日期 1998.03.12
申请号 JP1997003106 申请日期 1997.09.04
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