Verfahren zur Herstellung barrierenfreier Halbleiterspeicheranordnungen

摘要

This invention concerns a process for producing an integrated semiconductor storage assembly, particularly with ferroelectric materials as storage dielectrics. To that effect, a conductive connection between a first electrode of a storage capacitor and a selector transistor is only produced after depositing of the storage dielectric. This invention also concerns storage assemblies produced according to said production process.