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发明名称
摘要
申请公布号
JP2726219(B2)
申请公布日期
1998.03.11
申请号
JP19930163927
申请日期
1993.06.08
申请人
ERU JII DENSHI KK
发明人
SHIN SHINKO;KEN NEISEI;KIN SHODAI
分类号
H01L21/205;H01L21/027;H01L21/033;H01L21/285;H01L21/338;H01L29/812;(IPC1-7):H01L21/338
主分类号
H01L21/205
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