| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a wafer container structure capable of holding wafers effectively even in the case of a large-sized container. SOLUTION: This wafer container has both an opened front 40 formed out of a door accepting frame 60 and a door 24 having dimensions coinciding with the ones of the door accepting frame 60. The door accepting frame 60 has slots 72, 74 on both its sides, and the door 24 has a latching arm 118. This latching arm 118 is protruded from the end portions of the door 24 into the slots 72, 74 or is retreated from the slots 72, 74 into the inside of the door 24 to attach the door 24 to the frame 60 or take off the door 24 from the frame 60. Also, the door 24 has a wafer engaging arm. The wafer engaging arm is extended to the inside of the wafer container and toward wafers to fasten the wafers to the wafer container when the door 24 is fastened to the frame 60. The latching arm 118 and the wafer engaging arm are coupled to a rotatable cam member 80 in the inside of the door 24. The cam member 80 utilizes its so formed cam surface as to first latch the door 24 and then extend the wafer engaging arm.</p> |
