WIRING BOARD, ITS MANUFACTURE, AND DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce the wiring resistance in a wiring board with two-terminal nonlinear element of MIM(metal-insulator-metal) structure. SOLUTION: A lower electrode 11 of a two-terminal nonlinear element is formed of Ta and a signal wiring 12 is formed of Al or an alloy which is mainly composed of Al. The signal wiring 12 is used as an anode oxidation wiring and an insulation film 11a is formed by anode oxidation in a surface of the lower electrode 11. An upper electrode 13 is further formed by using an upper electrode Ti. Thereby, a two-terminal nonlinear element with a lamination structure of Ta/Ta2 O5 /Ti and a wiring board having the signal wiring 12 of a low resistance are completed.