| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean room for production of semiconductor devices which can have an improve transportation capability to fulfil a short turnaround time(TAT), etc. SOLUTION: In the clean room 11 for production of semiconductor devices, production devices 12 including various types of manufacturing and measuring devices to produce semiconductor devices are installed on a floor 16 in a production space 13, air is blown into the production space 12 from a ceiling side and returned to an air return space 17 below the floor through a ventilating part formed in the floor 16 for air circulation. A transportation route for transporting a transporting object 28 as a precursor part of a semiconductor device between the production devices is provided in the air return space 17 below the floor. Transfer of the precursor part between the transporting object 28 and production space 13 is carried out through openings 21 made in the floor.
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