,申请号JP19950292364-传众专利搜索

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发明名称
摘要	PURPOSE: To improve the surface protection and photoelectric conversion efficiency of an integrated photodetector having a photodetecting part and circuit part integrated on one chip. CONSTITUTION: A photodetecting part and circuit part are integrated on one chip with a silicon nitride film 13 as a surface protective film. Openings are formed through the surface protective film on the surface of the photodetecting part, leaving the protective film for protecting an Al electrode part 12 connected to the photodetecting part, and anti-reflection films 14 and 15 are formed on the surface of the photodetecting part in the openings, thereby improving the photoelectric conversion efficiency.
申请公布号	JP2723863(B2)	申请公布日期	1998.03.09
申请号	JP19950292364	申请日期	1995.11.10
申请人	MATSUSHITA DENSHI KOGYO KK	发明人	TAKASUKA MASANOBU;YAMAGUCHI MASAYUKI
分类号	G02B1/11;H01L21/316;H01L21/318;H01L21/822;H01L27/04;H01L27/14;H01L31/10	主分类号	G02B1/11
代理机构		代理人
主权项
地址

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