| 摘要 |
PROBLEM TO BE SOLVED: To guide a growing metal in the vertical direction in contact holes, to avoid overetching due to the density difference in the growing direction of the metal buried in the contact holes by using a metal different in nature. SOLUTION: On a first metal layer 15 contg. second metal layer spacers 16A, a third metal layer 17 for the plug is formed and made of one of Al, Cu and Ta, the same as the first layer 15. The first layer 15 little grows from the spacers 16A made of a different metal but quickly from the first layer 15 because of the same metal. Thus, the third metal in contact holes 19 grows mostly in the vertical direction to result in a uniform density of the third layer 17.
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