发明名称 |
PROCEDE DE TRANSFERT D'UNE COUCHE MINCE D'UN SUBSTRAT INITIAL SUR UN SUBSTRAT FINAL |
摘要 |
Transferring a thin layer (112) from an initial substrate to a final substrate (132) by means of a manipulation substrate (120) involves (a) connecting the free surface of the thin layer to an upper layer of the manipulation substrate (120), the upper layer being joined to the body of the manipulation substrate by a cleavage zone; (b) removing the initial substrate; (c) connecting the exposed face (114) of the thin layer (112) to a face (134) of the final substrate (132) and, (d) cleaving the manipulation substrate (120) along the cleavage zone. Preferably, the upper layer of the manipulation substrate is subsequently removed from the thin layer surface. |
申请公布号 |
FR2744285(B1) |
申请公布日期 |
1998.03.06 |
申请号 |
FR19960000852 |
申请日期 |
1996.01.25 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
BIASSE BEATRICE;BRUEL MICHEL;ZUSSY MARC |
分类号 |
H01L27/12;H01L21/02;H01L21/20;H01L21/762 |
主分类号 |
H01L27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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