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发明名称
PLASMA DEVICE
摘要
申请公布号
JPH1064883(A)
申请公布日期
1998.03.06
申请号
JP19960175231
申请日期
1996.07.04
申请人
APPLIED MATERIALS INC
发明人
KUMAGAI HIROMI
分类号
C23C16/50;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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