发明名称 THIN-FILM TRANSISTOR DEVICE, MANUFACTURING METHOD THEREOF, AND LIQUID CRYSTAL DISPLAY DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To enable a TFT(thin-film transistor) to be enhanced in mobility, reduced to zero in parasitic capacity, set applicable to a liquid crystal display device of large capacity and high accuracy, shortened in manufacturing process, and improved in productivity. SOLUTION: A second gate electrode 30 is formed in a self-aligned manner using a first gate electrode 20 as a mask, an offset region formed of an n-type polycrystalline silicon layer 23 is provided between a source electrode 24 and a semiconductor layer 22, and between a drain electrode 26 and a semiconductor layer 22, and the offset region is formed in a self-aligned manner using the gate electrode 30 as a mask.</p>
申请公布号 JPH1065177(A) 申请公布日期 1998.03.06
申请号 JP19960222276 申请日期 1996.08.23
申请人 TOSHIBA CORP 发明人 KASHIRO TAKESHI
分类号 G02F1/136;G02F1/1368;H01L21/336;H01L29/786;(IPC1-7):H01L29/786 主分类号 G02F1/136
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