METHOD FOR DETERMINING LASER-INDUCED COMPACTION IN FUSED SILICA
摘要
The invention relates to fused silica having low compaction under high energy irradation, particularly adaptable for use in photolithography applications.
申请公布号
WO9808776(A1)
申请公布日期
1998.03.05
申请号
WO1997US15234
申请日期
1997.08.27
申请人
CORNING INCORPORATED;ALLAN, DOUGLAS, C.;POWELL, WILLIAM, R.
